Sensonor SW4 intro

Information about Sensonor SW4 intro

Published on January 11, 2008

Author: Veronica1

Source: authorstream.com

Content

SensoNor’s Prosess SW4 :  SensoNor’s Prosess SW4 Henrik Jakobsen HVE Slide2:  BELP - 2 chip packaging technology PRESSURE SENSOR MICROSYSTEM SensoNor Fab technologies:  SensoNor Fab technologies Our strategy is to use “bulk-micromachining” of silicon as flexible high-yield standard processes The technology shall add unique features to microsystem products Front-end technology ”menu”:  Front-end technology ”menu” Slide5:  SW1 Technology N-type silicon P+ P++ P+ P++ 840 P+ P++ Sensor principle: piezoresistivity AE800 Processing on both sides of thin 2” wafers: symmetric with same process and pattern on both sides of wafer deep diffusions and low sheet resistivities Slide6:  SW2 Technology Sensor principle: piezoresistivity Process: Standard implanted resistors Anisotropic etch with time based stop AE880 Slide7:  SW3 Technology Sensor principle: piezoresistivity Process: High-stability buried resistors Anisotropic etch with time-based stop Option: NiCr/Au back-side metallization SP82 Standard process platform SW4:  Standard process platform SW4 Sensing principles: Piezoresistive Resonant structures (beams and plates) Actuation principle: Thermal Main technology: Silicon planar Electrochemical etch stop ICP-RIE Wafer lamination by anodic bonding Chemical micromachining of glass Features: Sealed cavities with electrical vias Two micro-machined thicknesses High stability piezoresistors for high accuracy Shallow piezoresistors Ultra flat surface SW4 - the “Foundry” MPW-process:  SW4 - the “Foundry” MPW-process Potential Applications: Pressure and flow sensors Accelerometers Micro actuators Micro fluidic components Precision structures for optical devices SW4 highlights:  SW4 highlights High-aspect-ratio etching with RIE Sealed cavity with electrical interconnect crossings High stability piezoresistors for sensing elements High-precision diaphragm definition by PN etch stop 3D-structuring of diaphragm is possible Slide11:  Microstructures Glass with recesses and via holes Silicon with recesses and via holes isotropic 90 deg walls 54.7 deg walls Slide12:  Absolute pressure sensors Vacuum cavity Pressure inlet port Diaphragm Glass Silicon Glass Wire bond pads Slide13:  Relative pressure sensors Pressure inlet port 2 Diaphragm Glass Silicon Glass Wire bond pads Pressure inlet port 1 Slide14:  Differential sensor with bottom ports Slide15:  Unique 3-D structures Combining wet etching and dry etching to make 3D structures Process 4 - cross-section :  Process 4 - cross-section

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